
Simultaneous/Multifunctional Analysis: Raman measurements Luminiscent measurements Laser Reflection and Transmission Measurements 3D high-contrast images in reflected light 3D Raman confocal measurements Information about spectral and polarization propertis of a sample
| Laser | Objective lens: magnification and numerical aperture NA |
XY Spatial resolution | Z Spatial resolution |
| 488 nm | 100X, NA = 0.95 | 295 nm | 450 nm |
| 633 nm | 100X, NA = 0.95 | 395 nm | 590 nm |
| 785 nm | 100X, NA = 0.95 | 560 nm | 750 nm |
| Spectral range for Raman spectra detection: | 30 cm -1 ~ 6000 cm -1 (depends on the wavelength of the excitation laser) |
| Spectral resolution: | 0,25 cm-1 (75 l/mm Echelle grating) |
| Sensitivity: | peak of the 4th order of the Raman spectrum of Si is detected within 1 min |
| Modes of scanning: | - Fast mapping: scanning of a laser beam along the surface of a sample with XY galvanoscanner - shifting a sample with XY motorized scanning stage near a fixed laser beam - combined mode for fast obtaining panoramic images with high spatial resolution: XY scanner (Fast mapping) + motorized microscope stage |
| Maximum scanning field size in the "Fast mapping" mode: | XY 150 х 150 μm (with objective lens 100х) |
| Period of registration for one frame 150 х 150 μм in the "Fast mapping" mode: | 3 s. / 1001 х 1001 pixels |
| PC control: | fully automated |
| *Type, model: | inverted Nikon Ti-S and upright Nikon Ni-U |
| Motorized scanning stage: | automated |
| - travel range | 114 х 75 mm |
| - accuracy (1 mm of shift) | 0.06 μm |
| - XY repeatability | ± 1 μm |
| - minimal step | 0.02 μm |
| Micro objective lens: | 100х NA-0.95 40х NA-0.75 20х NA-0.50 and other |
| Z-scanner: | piezo scanner |
| - objective translation range | 80 μm |
| - objective translation step | 50 nm |
| - repeatability | < 6 nm |
| High-resolution digital video camera: | digital color CCD camera |
| - sensor | 1/2", 2048 x 1536 pixels |
| - ADC | 10 bit, speed 12 frames/s |
| Laser radiation delivery: | three-position turret |
* other types of inverted or upright microscopes available
Optical-mechanical unit (OMU)
| Optimized optics for spectral range: | 325 - 1050 nm (UV-VIS-NIR) 400 - 1100 nm (VIS-NIR) |
| Laser radiation delivery: | triple- and quintuple input port |
| Laser beam attenuator: | automated unit with VND filter, 0 - 3D |
| Polarizers (excitation channel) and analyzer (detection channel): |
Glan-Taylor prism (automated unit) |
| Laser beam expander: | automated vario telescope, magnification factor 1.0 – 4.0x |
| Half-wave (λ/2) plate positioner: | automated three- / five-postion |
| Raman filter positioner: | automated three- / five-postion |
|
Interference filter positioner: |
automated six-position |
| Pre-pinhole objective lens positioner: | automated three-coordinated (X, Y, Z) |
| Optical configuration: | vertical |
| Focal length: | 520 mm |
| Magnification: | 1.0 vertical, 1.0 horizontal |
| Vertical spatial resolution: | < 20 μm |
| Flat field size: | 28 х 5 mm |
| Stray light: | 1 х 10-5 (20 nm from laser line 633 nm) |
| Diffraction grating unit: | automated four-position turret |
| Spectral resolution: (wavelength 500 nm, CCD pixel 12 x 12 μm) |
0.25 cm-1 (Echelle grating 75 l/mm) 0.9 cm-1 (grating 1800 l/mm) |
| Spectral slits: | |
| - entrance | automated confocal pinhole, smoothly regulated from 0 to 1.5 mm |
| - output | automated, smoothly regulated from 0 to 2 mm |
| Ports: | 1 input, 2 output |
| Output ports switching: | automated output mirror |
| Type: | digital CCD camera |
| Sensor type: | back-thinned CCD sensor 2048 х 122 pixels |
| Pixel size: | 12 x 12 μm |
| Pixel area size: | 24.576 x 1.464 mm (width x height) |
| Spectral response range: | from 200 to 1100 nm |
| Cooling with temperature stabilization: | two-stage Peltier element, min – 45 °С |
| ADC: | 16 bit |
| Sensivity: | 1 photon for 1 ADC reading (at the max. sensivity of 650 nm) |
| Dynamic range: | not less than 10 000 |
| Scanners: | galvanometer scanners with X, Y mirrors |
| Scanning modes: | raster high-speed and start-stop |
| Positioning accuracy: | 30 nm |
| Scanning area: | 150 μm х 150 μm (with 100Х objective lens) |
| Scanning speed: | 3 s/frame 1001 х 1001 pixels |
| Pre-pinhole objective lens positioner: | automated three-coordinate (X, Y, Z) |
| Confocal pinhole: | automated confocal pinhole, smoothly regulated from 0 to 1.5 mm |
| Detector: | Hamamatsu Photosensor module H6780-01 |
| Type of laser: | Up to 5 lasers can be used simultaneously | |
| Wavelength, nm | Output power, mW | |
| He-Cd Laser (Single Mode (TEM00) He-Cd): | 325 | 15, 30, 40, 50 |
| Diode-pumped Laser (DPSS): | 473 | 25, 50 |
| Diode-pumped Laser (DPSS): | 532 | 25, 50 |
| He-Ne Laser: | 633 | 10 |
| Diode-pumped laser (DPSS): | 785 | 80 |
| Using of other types of lasers with wavelength from 350 to 850 nm is possible | ||