產品介紹
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SPM3LR
The SPM-3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y. The Z portion of the SPM-3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. The step response time of the Z axis of the SPM-3LR.xxx.05 can be smaller than a millisecond. Hence, the SPM3LR stage is designed for demanding metrology applications such as Atomic Force Microscopy.
產品說明
The SPM-3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.
The Z portion of the SPM-3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. The step response time of the Z axis of the SPM-3LR.xxx.05 can be smaller than a millisecond.
Hence, the SPM3LR stage is designed for demanding metrology applications such as Atomic Force Microscopy.
Features :
- Ultra high speed Z axis
- All 3 axis are Direct drive
- 100, 200, 300 µm XY travel range
- 5, 10, 25, 50 µm Z travel range
- Closed loop control
- Silicon sensor technology
- Picometric noise floor
產品應用
Applications :
- Atomic Force Microscopy
- Scanning Probe Microscopy
- High speed and high resolution XYZ positioning
產品規格
Specifications :
| XY Specifications | ||||
|---|---|---|---|---|
| SPM-3LR.100.xx | SPM-3LR.200.xx | SPM3-LR.300.xx | Unit | |
| Range of motion X Y | 100 | 200 | 300 | µm |
| Resolution X Y | 0,1 | 0,2 | 0,3 | nm |
| Typical noise floor X Y | 0,01 | 0,02 | 0,03 | nm |
| Full range repeatability X Y | 0,2 | 0,4 | 0,6 | nm |
| Linearization X Y (typical) | 0,02% | 0,02% | 0,02% | |
| Resonant frequency X / Y | 500 / 300 | 350 / 200 | 250 / 150 | Hz |
| Stiffness X / Y | 0,6 / 0,35 | 0,5 / 0,3 | 0,4 / 0,25 | N/µm |
| Size W x L x H | 121 x 121 x (depend of Z axis range of motion) | mm | ||
| Z Specifications | |||||
|---|---|---|---|---|---|
| SPM-3LR.xxx.05 | SPM-3LR.xxx.10 | SPM-3LR.xxx.25 | SPM-3LR.xxx.50 | Unit | |
| Range of motion Z | 5 | 10 | 25 | 50 | µm |
| Resolution Z | 0,005 | 0,01 | 0,025 | 0,05 | nm |
| Typical noise floor Z | 0,0005 | 0,001 | 0,0025 | 0,005 | nm |
| Full range repeatability Z | 0,01 | 0,02 | 0,05 | 0,1 | nm |
| Linearization Z (typical) | 0,02% | 0,02% | 0,02% | ||
| Resonant frequency Z | 12 500 | 5 500 | 5 500 | 3 500 | Hz |
| Stiffness Z | 40 | 7,5 | 7,5 | 2,7 | N/µm |
| Size W x L x H | 121 x 121 x 33,7 | 121 x 121 x 33,7 | 121 x 121 x 49,7 | 121 x 121 x 69,7 | mm |
| General Specifications | ||
|---|---|---|
| SPM-3LR.xxx.xx | Unit | |
| Maximum load* : | ||
| - horizontal use | 0,1 | kg |
| - vertical use (max torque) | 0,01 | N.m |
| Sensor | Silicon HR sensor | |
| Material | Al | |
| Cable length** | 2 | m |
| Controller | High Speed |
SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request