產品介紹
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Z-STAGE
- High speed, direct drive - 5, 10, 25 or 50 µm travel range - Closed loop control - Silicon sensor technology - Less than 10pm noise floor
產品說明
The Z-stage is a compact Z direct-drive nanopositioner which has high speed capabilities. It can be combined with a 2 axis nanopositioner which has a 66×66 mm aperture (LT2/LFHS2) or with an assembly of 2 compact HS1 Aperture.
The Z stage can be offered with either 5, 10, 25 or 50µm range of motion.
This nanopositioner is part of our high-speed product line (High power controller available).產品應用
- AFM Z scanner
- Casimir Force study
- Fast Z scanning
- Nanoindentation
Exemple of use :
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| Z.5 on the LT-2.100 | Z.50 on 2 stacked HS-1.50 Aperture |
LFHS-2 with Z-STAGE.50 on a Manual Stage
產品規格
| Unit | Z.5 | Z.10 | Z.25 | Z.50 | |
| Range of motion | (µm) | 5 | 10 | 25 | 50 |
| Resolution | (nm) | 0,005 | 0,01 | 0,025 | 0,05 |
| Typical noise floor | (nm) | 0,0005 | 0,001 | 0,0025 | 0,005 |
| Full range repeatability | (nm) | 0,01 | 0,02 | 0,05 | 0,1 |
| Linearization (typical) | 0,02% | 0,02% | 0,02% | 0,02% | |
| Resonant frequency | (Hz) | 12 500 | 5 200 | 5 500 | 3 500 |
| Stiffness | (N/µm) | 40,1 | 7,5 | 7,7 | 2,7 |
| Maximum load* : | |||||
| – horizontal use | (kg) | 0,1 | 0,1 | 0,1 | 0,1 |
| – vertical use (max torque) | (N.m) | 0,01 | 0,01 | 0,01 | 0,01 |
| Sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | Silicon HR sensor | |
| Size Ø x H | (mm) | Ø30 x 29,8 | Ø30 x 29,8 | Ø30 x 49,8 | Ø30 x 69,8 |
| Material | Al | Al | Al | Al | |
| Cable length | (m) | 2 | 2 | 2 | 2 |
| Controller | Standard or High Speed | Standard or High Speed | Standard or High Speed | Standard or High Speed |
*Higher load on request